xov xwm

Pob zeb diamond hlau txiav tshuab tseem hu ua consolidation abrasive txiav tshuab.Nws yog siv cov electroplating los yog resin bonding txoj kev ntawm pob zeb diamond abrasive consolidated nyob rau saum npoo ntawm steel hlau, pob zeb diamond hlau ncaj qha ua rau ntawm silicon pas nrig los yog silicon ingot los tsim kev sib tsoo, kom ua tiav cov nyhuv ntawm kev txiav.Pob zeb diamond hlau txiav muaj cov yam ntxwv ntawm kev txiav ceev ceev, siab txiav raug thiab cov khoom siv tsawg.

Tam sim no, ib qho kev lag luam siv lead ua rau pob zeb diamond hlau txiav silicon wafer tau txais tag nrho, tab sis nws kuj tau ntsib nyob rau hauv cov txheej txheem ntawm kev nce qib, ntawm cov velvet dawb yog qhov teeb meem feem ntau.Raws li qhov no, daim ntawv no tsom mus rau yuav ua li cas tiv thaiv pob zeb diamond hlau txiav monocrystalline silicon wafer velvet dawb teeb meem.

Cov txheej txheem ntxuav ntawm pob zeb diamond hlau txiav monocrystalline silicon wafer yog tshem tawm cov silicon wafer txiav los ntawm cov hlau pom tshuab los ntawm cov phaj cob, tshem tawm cov roj hmab sawb, thiab ntxuav cov silicon wafer.Cov khoom siv tu tsev feem ntau yog lub tshuab ntxuav ua ntej (degumming tshuab) thiab lub tshuab ntxuav.Lub ntsiab tu txheej txheem ntawm lub tshuab ntxuav ua ntej yog: pub mis-txhaj tshuaj-txhaj tshuaj-ultrasonic tu-degumming-ntxuav dej yaug-hauv qab pub mis.Cov txheej txheem tu lub ntsiab ntawm lub tshuab ntxuav yog: pub-dej ntshiab yaug-ntshiab dej yaug-alkali ntxuav-alkali ntxuav-ntshiab dej yaug-ntshiab dej yaug-ua ntej-lub cev qhuav dej (slow lifting) -drying-feeding.

Lub hauv paus ntsiab lus ntawm ib leeg-crystal velvet ua

Monocrystalline silicon wafer yog tus yam ntxwv ntawm anisotropic corrosion ntawm monocrystalline silicon wafer.Lub hauv paus ntsiab lus ntawm cov tshuaj tiv thaiv yog cov tshuaj tiv thaiv kab mob hauv qab no:

Si + 2NaOH + H2O = Na2SiO3 + 2H2↑

Hauv cov ntsiab lus, cov txheej txheem tsim suede yog: NaOH tov rau qhov sib txawv corrosion ntawm qhov sib txawv siv lead ua, (100) nto corrosion ceev tshaj (111), yog li (100) mus rau monocrystalline silicon wafer tom qab anisotropic corrosion, nws thiaj li tsim rau saum npoo rau (111) plaub-sided cone, uas yog "pyramid" qauv (raws li qhia hauv daim duab 1).Tom qab cov qauv tsim, thaum lub teeb yog tshwm sim rau lub pyramid txoj kab nqes ntawm ib lub kaum sab xis, lub teeb yuav raug reflected mus rau txoj kab nqes ntawm lwm lub kaum sab xis, tsim ib tug thib ob los yog ntau dua absorption, yog li txo cov reflectivity ntawm lub silicon wafer. , uas yog, lub teeb ntxiab nyhuv (saib daim duab 2).Qhov zoo dua qhov loj thiab qhov sib xws ntawm "pyramid" qauv, qhov pom tseeb dua cov cuab yeej cuab tam, thiab qhov qis dua ntawm qhov emitrate ntawm silicon wafer.

Daim duab 1: Micromorphology ntawm monocrystalline silicon wafer tom qab alkali ntau lawm

Daim duab 2: Lub teeb teeb lub hauv paus ntsiab lus ntawm "pyramid" qauv

Kev tsom xam ntawm ib qho crystal whitening

Los ntawm kev tshuaj ntsuam xyuas electron microscope ntawm dawb silicon wafer, nws tau pom tias cov pyramid microstructure ntawm cov dawb wafer nyob rau hauv cheeb tsam yeej tsis tsim, thiab saum npoo zoo li muaj ib txheej ntawm "waxy" residue, thaum lub pyramid qauv ntawm suede. hauv thaj tsam dawb ntawm tib silicon wafer tau tsim zoo dua (saib daim duab 3).Yog hais tias muaj residues nyob rau saum npoo ntawm monocrystalline silicon wafer, qhov saum npoo yuav muaj seem seem "pyramid" qauv loj thiab uniformity tiam thiab cov nyhuv ntawm ib txwm cheeb tsam yog tsis txaus, uas ua rau ib tug residual velvet nto reflectivity yog siab tshaj qhov qub cheeb tsam, thaj chaw uas muaj kev cuam tshuam siab piv rau thaj chaw ib txwm muaj nyob rau hauv qhov muag pom tau zoo li dawb.Raws li tuaj yeem pom los ntawm kev faib cov duab ntawm thaj chaw dawb, nws tsis yog ib txwm muaj lossis tsis tu ncua hauv cheeb tsam loj, tab sis tsuas yog hauv cheeb tsam.Nws yuav tsum yog tias cov pa phem hauv zos ntawm qhov chaw ntawm silicon wafer tsis tau ntxuav, lossis qhov xwm txheej ntawm silicon wafer yog tshwm sim los ntawm cov pa phem thib ob.

Daim duab 3: Kev sib piv ntawm cheeb tsam microstructure sib txawv hauv velvet dawb silicon wafers

Qhov saum npoo ntawm pob zeb diamond hlau txiav silicon wafer yog du thiab qhov kev puas tsuaj me dua (raws li qhia hauv daim duab 4).Piv nrog rau cov mortar silicon wafer, cov tshuaj tiv thaiv ceev ntawm alkali thiab pob zeb diamond hlau txiav silicon wafer nto yog qeeb dua li ntawm cov mortar txiav monocrystalline silicon wafer, yog li qhov cuam tshuam ntawm cov seem seem ntawm cov nyhuv velvet yog pom tseeb dua.

Daim duab 4: (A) Nto micrograph ntawm mortar txiav silicon wafer (B) nto micrograph ntawm pob zeb diamond hlau txiav silicon wafer

Lub ntsiab residual qhov chaw ntawm pob zeb diamond hlau-txiav silicon wafer nto

(1) Coolant: cov khoom tseem ceeb ntawm pob zeb diamond hlau txiav coolant yog surfactant, dispersant, defamagent thiab dej thiab lwm yam khoom.Cov kua txiav nrog kev ua tau zoo heev muaj kev ncua zoo, dispersion thiab yooj yim tu muaj peev xwm.Surfactants feem ntau muaj cov khoom siv hydrophilic zoo dua, uas yooj yim los ntxuav tawm hauv cov txheej txheem silicon wafer tu.Kev nplawm tas li thiab kev ncig ntawm cov khoom siv ntxiv hauv cov dej no yuav tsim cov npuas dej ntau, ua rau txo qis ntawm cov dej txias, cuam tshuam rau kev ua haujlwm txias, thiab ua npuas ncauj loj thiab txawm tias npuas dej dhau teeb meem, uas yuav cuam tshuam rau kev siv.Yog li ntawd, lub coolant feem ntau yog siv nrog tus neeg saib xyuas defoaming.Txhawm rau kom ntseeg tau tias kev ua haujlwm defoaming, cov tsoos silicone thiab polyether feem ntau tsis zoo hydrophilic.Cov kuab tshuaj nyob rau hauv dej yog yooj yim heev rau adsorb thiab nyob twj ywm rau ntawm qhov chaw ntawm silicon wafer nyob rau hauv lub tom ntej tu, uas ua rau cov teeb meem ntawm dawb chaw.Thiab tsis zoo sib xws nrog lub ntsiab Cheebtsam ntawm lub coolant, Yog li ntawd, nws yuav tsum tau ua nyob rau hauv ob lub Cheebtsam, Main Cheebtsam thiab defoaming agents tau ntxiv nyob rau hauv dej, nyob rau hauv tus txheej txheem ntawm kev siv, raws li qhov teeb meem ua npuas ncauj, Unable tsis quantitatively tswj lub Kev siv thiab ntau npaum li cas ntawm cov tshuaj tiv thaiv kab mob, tuaj yeem tso cai rau kev siv tshuaj ntau dhau ntawm cov neeg ua haujlwm anoaming, Ua rau muaj kev nce hauv silicon wafer nto residues, Nws tseem tsis yooj yim rau kev khiav lag luam, Txawm li cas los xij, vim tus nqi qis ntawm cov khoom siv raw thiab defoaming tus neeg sawv cev raw. cov ntaub ntawv, Yog li ntawd, feem ntau ntawm domestic coolant tag nrho siv cov qauv no;Lwm lub coolant siv tus neeg sawv cev tshiab defoaming, tuaj yeem ua tau zoo nrog cov khoom tseem ceeb, Tsis muaj ntxiv, tuaj yeem tswj tau nws cov nyiaj ntau, tuaj yeem tiv thaiv kev siv ntau dhau, Cov kev tawm dag zog kuj yooj yim heev los ua, Nrog rau kev tu kom zoo, Nws Cov residues tuaj yeem tswj tau qis heev, Hauv Nyij Pooj thiab ob peb lub tuam txhab tsim khoom siv cov qauv no, Txawm li cas los xij, vim nws cov nqi raw khoom siab, Nws tus nqi kom zoo dua tsis pom tseeb.

(2) Cov kua nplaum thiab cov resin version: nyob rau theem tom qab ntawm cov pob zeb diamond hlau txiav txheej txheem, silicon wafer nyob ze ntawm qhov kawg tuaj tau raug txiav ua ntej, silicon wafer ntawm qhov hluav taws xob kawg tseem tsis tau txiav, Lub pob zeb diamond thaum ntxov xaim tau pib txiav rau cov roj hmab txheej thiab cov phaj cob, Txij li cov silicon pas nrig kua nplaum thiab cov khoom siv cob yog ob qho tib si epoxy resin khoom, Nws qhov muag muag yog qhov nruab nrab ntawm 55 thiab 95 ℃, Yog tias qhov muag muag ntawm cov roj hmab txheej los yog cov resin. phaj tsis tshua muaj, nws tuaj yeem ua kom sov tau yooj yim thaum lub sijhawm txiav thiab ua rau nws ua mos thiab yaj, Txuas nrog cov hlau hlau thiab silicon wafer nto, Ua rau lub peev xwm ntawm cov pob zeb diamond kab txo qis, Los yog cov silicon wafers tau txais thiab stained nrog resin, Thaum txuas, nws yog qhov nyuaj heev los ntxuav tawm, Cov kab mob no feem ntau tshwm sim ze ntawm ntug ntug ntawm silicon wafer.

(3) silicon hmoov: nyob rau hauv cov txheej txheem ntawm pob zeb diamond hlau txiav yuav tsim ntau ntawm silicon hmoov, nrog rau kev txiav, mortar coolant hmoov cov ntsiab lus yuav ntau thiab ntau siab, thaum cov hmoov loj txaus, yuav ua raws li cov silicon nto, thiab pob zeb diamond hlau txiav ntawm silicon hmoov loj thiab loj ua rau nws yooj yim rau adsorption ntawm silicon nto, ua rau nws nyuaj rau ntxuav.Yog li ntawd, xyuas kom meej qhov hloov tshiab thiab zoo ntawm lub coolant thiab txo cov hmoov cov ntsiab lus nyob rau hauv lub coolant.

(4) Tus neeg saib xyuas tu: tam sim no siv cov pob zeb diamond hlau txiav cov tuam txhab feem ntau siv cov tshuaj khib nyiab tib lub sijhawm, feem ntau yog siv cov mortar txiav prewashing, ntxuav cov txheej txheem thiab ntxuav tus neeg saib xyuas, thiab lwm yam. ua tiav cov kab, coolant thiab mortar txiav muaj qhov sib txawv loj, yog li cov txheej txheem kev sib raug zoo, kev tu tus neeg saib xyuas ntau npaum li cas, cov mis, thiab lwm yam yuav tsum yog rau cov pob zeb diamond hlau txiav ua cov kev hloov kho.Kev tu tus neeg saib xyuas yog ib qho tseem ceeb, tus thawj tu tus neeg saib xyuas cov mis surfactant, alkalinity tsis haum rau kev tu pob zeb diamond hlau txiav silicon wafer, yuav tsum yog rau saum npoo ntawm pob zeb diamond hlau silicon wafer, muaj pes tsawg leeg thiab cov seem seem ntawm tus neeg saib xyuas tu, thiab coj nrog txheej txheem ntxuav.Raws li tau hais los saum toj no, qhov muaj pes tsawg leeg ntawm defoaming tus neeg sawv cev tsis xav tau hauv kev txiav mortar.

(5) Dej: pob zeb diamond hlau txiav, ntxuav ua ntej thiab ntxuav cov dej ntws tawm muaj impurities, nws yuav raug adsorbed rau saum npoo ntawm silicon wafer.

Txo qhov teeb meem ntawm kev ua velvet plaub hau dawb tshwm tawm tswv yim

(1) Txhawm rau siv lub coolant nrog zoo dispersion, thiab lub coolant yuav tsum tau siv cov low-residue defoaming tus neeg saib xyuas kom txo tau cov seem ntawm cov coolant Cheebtsam nyob rau saum npoo ntawm silicon wafer;

(2) Siv cov kua nplaum tsim nyog thiab cov phaj resin los txo cov pa phem ntawm silicon wafer;

(3) Lub coolant yog diluted nrog dej ntshiab kom paub tseeb tias tsis muaj ib qho yooj yim residual impurities nyob rau hauv cov dej siv;

(4) Rau saum npoo ntawm pob zeb diamond hlau txiav silicon wafer, siv cov kev ua si thiab cov nyhuv tu kom zoo dua tus neeg saib xyuas;

(5) Siv cov pob zeb diamond kab coolant hauv online rov qab los txo cov ntsiab lus ntawm silicon hmoov hauv cov txheej txheem txiav, thiaj li tswj tau cov khoom seem ntawm silicon hmoov ntawm silicon wafer nto ntawm wafer.Nyob rau tib lub sijhawm, nws tseem tuaj yeem txhim kho cov dej kub, ntws thiab lub sijhawm ntawm kev ntxuav ua ntej, kom ntseeg tau tias cov hmoov silicon tau ntxuav hauv lub sijhawm.

(6) Thaum cov silicon wafer muab tso rau ntawm lub rooj ntxuav, nws yuav tsum tau kho tam sim ntawd, thiab khaws cov silicon wafer ntub thaum lub sij hawm ntxuav tag nrho.

(7) Lub silicon wafer ua kom lub ntsej muag ntub hauv cov txheej txheem degumming, thiab tsis tuaj yeem qhuav ib txwm.(8) Nyob rau hauv cov txheej txheem ntxuav ntawm silicon wafer, lub sij hawm nthuav tawm hauv huab cua tuaj yeem txo kom deb li deb tau los tiv thaiv cov paj tsim ntawm qhov chaw ntawm silicon wafer.

(9) Cov neeg ua haujlwm tu yuav tsum tsis txhob tiv tauj ncaj qha rau saum npoo ntawm silicon wafer thaum lub sijhawm tu tag nrho, thiab yuav tsum hnav hnab looj tes roj hmab, thiaj li tsis tsim cov ntawv luam tawm.

(10) Hauv kev siv [2], lub roj teeb kawg siv hydrogen peroxide H2O2 + alkali NaOH ntxuav txheej txheem raws li qhov ntim piv ntawm 1:26 (3% NaOH tov), ​​uas tuaj yeem txo qhov tshwm sim ntawm qhov teeb meem.Nws lub hauv paus ntsiab lus zoo ib yam li SC1 ntxuav cov tshuaj (feem ntau hu ua kua 1) ntawm ib lub semiconductor silicon wafer.Nws lub ntsiab mechanism: oxidation zaj duab xis ntawm silicon wafer nto yog tsim los ntawm oxidation ntawm H2O2, uas yog corroded los ntawm NaOH, thiab oxidation thiab corrosion tshwm sim dua.Yog li ntawd, cov khoom uas txuas nrog silicon hmoov, resin, hlau, thiab lwm yam) kuj poob rau hauv cov kua ntxuav nrog cov txheej txheem corrosion;Vim yog oxidation ntawm H2O2, cov organic teeb meem ntawm lub wafer nto yog decomposed rau hauv CO2, H2O thiab tshem tawm.Cov txheej txheem ntawm kev ntxuav no tau ua silicon wafer manufacturers siv cov txheej txheem no los ua cov txheej txheem ntxuav ntawm pob zeb diamond hlau txiav monocrystalline silicon wafer, silicon wafer nyob rau hauv domestic thiab Taiwan thiab lwm yam roj teeb manufacturers batch siv velvet dawb teeb meem tsis txaus siab.Tseem muaj cov tuam txhab roj teeb tau siv cov txheej txheem ua ntej velvet zoo sib xws, kuj tseem tswj tau qhov zoo ntawm velvet dawb.Nws tuaj yeem pom tias cov txheej txheem ntxuav no ntxiv rau hauv cov txheej txheem ntxuav silicon wafer kom tshem tawm cov silicon wafer residue thiaj li daws tau qhov teeb meem ntawm cov plaub hau dawb ntawm lub roj teeb kawg.

xaus

Tam sim no, pob zeb diamond hlau txiav tau dhau los ua cov thev naus laus zis tseem ceeb hauv kev ua haujlwm ntawm ib leeg siv lead ua, tab sis nyob rau hauv tus txheej txheem ntawm kev txhawb nqa qhov teeb meem ntawm kev ua velvet dawb tau teeb meem silicon wafer thiab roj teeb manufacturers, ua rau cov tuam txhab roj teeb rau pob zeb diamond hlau txiav silicon. wafer muaj qee qhov tsis kam.Los ntawm kev sib piv kev tsom xam ntawm thaj chaw dawb, nws feem ntau yog tshwm sim los ntawm cov seem ntawm cov silicon wafer.Txhawm rau tiv thaiv kom tsis txhob muaj teeb meem ntawm silicon wafer hauv lub xov tooj ntawm tes, daim ntawv no txheeb xyuas cov peev txheej ntawm cov pa phem ntawm silicon wafer, nrog rau cov lus qhia txog kev txhim kho thiab kev ntsuas hauv kev tsim khoom.Raws li tus naj npawb, cheeb tsam thiab cov duab ntawm cov pob dawb, qhov ua rau tuaj yeem txheeb xyuas thiab txhim kho.Tshwj xeeb tshaj yog pom zoo kom siv hydrogen peroxide + alkali ntxuav txheej txheem.Qhov kev vam meej tau ua pov thawj tias nws tuaj yeem tiv thaiv tau qhov teeb meem ntawm pob zeb diamond hlau txiav silicon wafer ua velvet whitening, rau kev siv ntawm kev lag luam sab hauv thiab manufacturers.