Cov txheej txheem txiav hlau pob zeb diamond tseem hu ua kev sib sau ua ke abrasive txiav tshuab. Nws yog kev siv electroplating lossis resin bonding txoj kev ntawm pob zeb diamond abrasive sib sau ua ke rau ntawm qhov chaw ntawm cov hlau hlau, pob zeb diamond hlau ncaj qha ua rau ntawm qhov chaw ntawm silicon pas nrig lossis silicon ingot los tsim kev sib tsoo, kom ua tiav cov txiaj ntsig ntawm kev txiav. Pob zeb diamond hlau txiav muaj cov yam ntxwv ntawm kev txiav ceev ceev, kev txiav raug siab thiab kev poob khoom tsawg.
Tam sim no, kev lag luam siv lead ua ib leeg rau pob zeb diamond hlau txiav silicon wafer tau txais kev lees paub tag nrho, tab sis nws kuj tau ntsib hauv cov txheej txheem ntawm kev txhawb nqa, ntawm cov velvet dawb yog qhov teeb meem feem ntau. Vim li no, daim ntawv no tsom mus rau yuav ua li cas tiv thaiv cov teeb meem monocrystalline silicon wafer velvet dawb txiav pob zeb diamond hlau.
Cov txheej txheem ntxuav ntawm cov pob zeb diamond hlau txiav monocrystalline silicon wafer yog tshem tawm cov silicon wafer txiav los ntawm cov cuab yeej siv tshuab hlau pom ntawm lub phaj resin, tshem tawm cov roj hmab strip, thiab ntxuav cov silicon wafer. Cov khoom siv ntxuav feem ntau yog lub tshuab ntxuav ua ntej (tshuab degumming) thiab lub tshuab ntxuav. Cov txheej txheem ntxuav tseem ceeb ntawm lub tshuab ntxuav ua ntej yog: pub-tsuag-tsuag-ultrasonic ntxuav-degumming-dej huv yaug-tsis pub noj. Cov txheej txheem ntxuav tseem ceeb ntawm lub tshuab ntxuav yog: pub-dej ntshiab yaug-dej ntshiab yaug-alkali ntxuav-alkali ntxuav-dej ntshiab yaug-dej ntshiab yaug-ua ntej-dehydration (qeeb qeeb) -qhuav-pub noj.
Lub hauv paus ntsiab lus ntawm kev ua cov velvet ib leeg-siv lead ua
Monocrystalline silicon wafer yog tus yam ntxwv ntawm anisotropic corrosion ntawm monocrystalline silicon wafer. Lub hauv paus ntsiab lus ntawm kev ua tshuaj yog cov kab zauv tshuaj lom neeg hauv qab no:
Si + 2NaOH + H2O = Na2SiO3 + 2H2↑
Hauv qhov tseem ceeb, cov txheej txheem tsim suede yog: NaOH kua rau qhov sib txawv ntawm qhov sib txawv ntawm qhov chaw siv lead ua, (100) qhov ceev ntawm qhov chaw xeb dua li (111), yog li (100) rau monocrystalline silicon wafer tom qab anisotropic corrosion, thaum kawg tsim rau ntawm qhov chaw rau (111) plaub-sab cone, uas yog "pyramid" qauv (raws li pom hauv daim duab 1). Tom qab cov qauv tsim, thaum lub teeb tshwm sim rau ntawm qhov nqes hav pyramid ntawm qee lub kaum sab xis, lub teeb yuav raug cuam tshuam rau ntawm qhov nqes hav ntawm lwm lub kaum sab xis, tsim kom muaj qhov nqus theem ob lossis ntau dua, yog li txo qhov kev cuam tshuam ntawm qhov chaw ntawm silicon wafer, uas yog, qhov cuam tshuam ntawm lub teeb (saib Daim Duab 2). Qhov zoo dua qhov loj me thiab kev sib xws ntawm "pyramid" qauv, qhov pom tseeb dua qhov cuam tshuam, thiab qhov qis dua qhov chaw emitrate ntawm silicon wafer.
Daim Duab 1: Micromorphology ntawm monocrystalline silicon wafer tom qab alkali ntau lawm
Daim Duab 2: Lub hauv paus ntsiab lus ntawm lub teeb ntawm cov qauv "pyramid"
Kev tshuaj xyuas ntawm cov khoom siv lead ua dawb
Los ntawm kev luam theej duab electron microscope ntawm lub silicon wafer dawb, nws pom tias lub pyramid microstructure ntawm lub wafer dawb hauv thaj chaw tsis tau tsim, thiab qhov chaw zoo li muaj ib txheej ntawm "waxy" residue, thaum lub pyramid qauv ntawm suede hauv thaj chaw dawb ntawm tib lub silicon wafer tau tsim zoo dua (saib Daim Duab 3). Yog tias muaj cov residues ntawm qhov chaw ntawm monocrystalline silicon wafer, qhov chaw yuav muaj qhov seem "pyramid" qauv loj thiab uniformity tiam thiab cov nyhuv ntawm thaj chaw ib txwm tsis txaus, ua rau qhov seem velvet surface reflectivity siab dua thaj chaw ib txwm, thaj chaw nrog siab reflectivity piv rau thaj chaw ib txwm hauv qhov muag pom tau tias dawb. Raws li tuaj yeem pom los ntawm cov duab faib ntawm thaj chaw dawb, nws tsis yog ib txwm lossis ib txwm muaj duab hauv thaj chaw loj, tab sis tsuas yog hauv thaj chaw hauv zos. Nws yuav tsum yog tias cov pa phem hauv zos ntawm qhov chaw ntawm silicon wafer tsis tau ntxuav, lossis qhov xwm txheej ntawm silicon wafer yog tshwm sim los ntawm kev ua qias tuaj theem ob.
Daim Duab 3: Kev sib piv ntawm cov qauv me me hauv cheeb tsam hauv cov velvet dawb silicon wafers
Qhov saum npoo ntawm cov pob zeb diamond hlau txiav silicon wafer yog du dua thiab qhov puas tsuaj me dua (raws li qhia hauv Daim Duab 4). Piv nrog rau cov mortar silicon wafer, qhov ceev ntawm cov alkali thiab cov pob zeb diamond hlau txiav silicon wafer nto qeeb dua li ntawm cov mortar txiav monocrystalline silicon wafer, yog li qhov cuam tshuam ntawm cov seem saum npoo ntawm cov nyhuv velvet yog qhov pom tseeb dua.
Daim Duab 4: (A) Daim duab me me ntawm qhov chaw txiav silicon wafer (B) Daim duab me me ntawm qhov chaw txiav silicon wafer los ntawm hlau pob zeb diamond
Qhov chaw seem tseem ceeb ntawm pob zeb diamond hlau-txiav silicon wafer nto
(1) Cov dej txias: cov khoom tseem ceeb ntawm cov dej txias txiav pob zeb diamond yog surfactant, dispersant, defamagent thiab dej thiab lwm yam khoom. Cov kua txiav nrog kev ua tau zoo heev muaj kev ncua zoo, dispersion thiab yooj yim ntxuav. Surfactants feem ntau muaj cov khoom hydrophilic zoo dua, uas yooj yim ntxuav tawm hauv cov txheej txheem ntxuav silicon wafer. Kev sib xyaw thiab kev ncig ntawm cov khoom ntxiv no hauv dej yuav tsim ntau cov npuas dej, ua rau cov dej txias ntws tsawg dua, cuam tshuam rau kev ua kom txias, thiab ua rau muaj teeb meem loj heev rau cov npuas dej thiab txawm tias cov npuas dej ntau dhau, uas yuav cuam tshuam loj heev rau kev siv. Yog li ntawd, cov dej txias feem ntau siv nrog cov neeg sawv cev defoaming. Txhawm rau kom ntseeg tau tias muaj kev ua haujlwm defoaming, cov silicone ib txwm muaj thiab polyether feem ntau tsis zoo hydrophilic. Cov kuab tshuaj hauv dej yooj yim heev rau adsorb thiab nyob ntawm qhov chaw ntawm silicon wafer hauv kev ntxuav tom qab, ua rau muaj teeb meem ntawm cov pob dawb. Thiab tsis sib haum nrog cov khoom tseem ceeb ntawm cov dej txias, Yog li ntawd, nws yuav tsum tau ua ob yam khoom, Cov khoom tseem ceeb thiab cov neeg ua npuas dej tau ntxiv rau hauv dej, Thaum siv, raws li qhov xwm txheej ua npuas dej, Tsis tuaj yeem tswj hwm kev siv thiab koob tshuaj ntawm cov neeg ua npuas dej, Yooj yim tso cai rau kev siv ntau dhau ntawm cov neeg ua npuas dej, Ua rau cov seem ntawm cov silicon wafer nce ntxiv, Nws kuj tsis yooj yim rau kev ua haujlwm, Txawm li cas los xij, vim tus nqi qis ntawm cov khoom siv raw thiab cov neeg ua npuas dej raw, Yog li ntawd, feem ntau ntawm cov dej txias hauv tsev siv cov mis no; Lwm cov dej txias siv cov neeg ua npuas dej tshiab, Yuav sib haum nrog cov khoom tseem ceeb, Tsis muaj kev ntxiv, Yuav tswj tau zoo thiab ntau npaum li cas, Yuav tiv thaiv kev siv ntau dhau, Cov kev tawm dag zog kuj yooj yim heev rau ua, Nrog cov txheej txheem ntxuav kom zoo, Nws cov seem tuaj yeem tswj tau rau qib qis heev, Hauv Nyiv Pooj thiab ob peb lub tuam txhab hauv tsev siv cov mis no, Txawm li cas los xij, vim nws cov nqi khoom siv raw siab, Nws qhov zoo ntawm tus nqi tsis pom tseeb.
(2) Cov kua nplaum thiab cov roj hmab: nyob rau theem tom qab ntawm cov txheej txheem txiav hlau pob zeb diamond, Cov silicon wafer ze ntawm qhov kawg tau txiav ua ntej, Cov silicon wafer ntawm qhov kawg tsis tau txiav, Cov hlau pob zeb diamond txiav thaum ntxov tau pib txiav rau cov roj hmab txheej thiab cov phaj resin, Vim tias cov kua nplaum silicon pas nrig thiab cov phaj resin yog ob qho tib si epoxy resin khoom, Nws qhov softening point yog qhov nruab nrab ntawm 55 thiab 95 ℃, Yog tias qhov softening point ntawm cov roj hmab txheej lossis cov phaj resin qis, nws tuaj yeem yooj yim kub thaum lub sijhawm txiav thiab ua rau nws mos thiab yaj, Txuas rau cov hlau hlau thiab cov silicon wafer nto, Ua rau lub peev xwm txiav ntawm cov kab pob zeb diamond txo qis, Lossis cov silicon wafers tau txais thiab pleev xim nrog cov roj hmab, Thaum txuas, nws nyuaj heev rau ntxuav tawm, Cov kuab paug no feem ntau tshwm sim ze ntawm ntug ntawm silicon wafer.
(3) hmoov silicon: thaum txiav cov hlau pob zeb diamond, yuav muaj ntau cov hmoov silicon, thaum txiav, cov hmoov txias hauv cov mortar yuav ntau dua thiab ntau dua, thaum cov hmoov loj txaus, nws yuav lo rau ntawm qhov chaw silicon, thiab cov hmoov silicon uas txiav los ntawm cov hlau pob zeb diamond yuav yooj yim nqus rau ntawm qhov chaw silicon, ua rau nyuaj rau ntxuav. Yog li ntawd, xyuas kom meej tias cov dej txias hloov kho thiab zoo thiab txo cov hmoov hauv cov dej txias.
(4) tus neeg sawv cev ntxuav: cov tuam txhab siv cov hlau txiav pob zeb diamond feem ntau siv cov tshuaj txiav pob zeb diamond tib lub sijhawm, feem ntau siv cov tshuaj ntxuav ua ntej txiav pob zeb diamond, cov txheej txheem ntxuav thiab cov neeg sawv cev ntxuav, thiab lwm yam., cov txheej txheem txiav pob zeb diamond ib leeg los ntawm cov txheej txheem txiav, tsim cov kab tiav, cov dej txias thiab cov tshuaj txiav pob zeb diamond muaj qhov sib txawv loj, yog li cov txheej txheem ntxuav sib xws, cov tshuaj ntxuav ntau npaum li cas, cov mis, thiab lwm yam yuav tsum tau hloov kho rau cov pob zeb diamond txiav pob zeb diamond. Tus neeg sawv cev ntxuav yog ib qho tseem ceeb, cov tshuaj ntxuav thawj zaug yog cov tshuaj surfactant, alkalinity tsis haum rau kev ntxuav cov pob zeb diamond txiav pob zeb diamond wafer, yuav tsum yog rau qhov chaw ntawm pob zeb diamond wafer, cov khoom sib xyaw thiab cov khoom seem ntawm cov tshuaj ntxuav, thiab coj nrog cov txheej txheem ntxuav. Raws li tau hais los saum toj no, cov khoom sib xyaw ntawm cov neeg sawv cev defoaming tsis xav tau hauv kev txiav pob zeb diamond.
(5) Dej: txiav hlau pob zeb diamond, ntxuav ua ntej thiab ntxuav cov dej ntws muaj cov khoom tsis huv, nws yuav raug nqus rau ntawm qhov chaw ntawm silicon wafer.
Txo qhov teeb meem ntawm kev ua kom cov plaub hau velvet dawb tshwm sim cov lus qhia
(1) Siv cov dej txias uas muaj kev sib kis zoo, thiab cov dej txias yuav tsum siv cov tshuaj defoaming uas tsis muaj cov seem ntau kom txo cov seem ntawm cov khoom siv dej txias rau ntawm qhov chaw ntawm silicon wafer;
(2) Siv cov kua nplaum thiab cov phaj resin kom txo tau cov pa phem ntawm silicon wafer;
(3) Cov dej txias raug diluted nrog dej ntshiab kom ntseeg tau tias tsis muaj cov khoom seem yooj yim hauv cov dej siv;
(4) Rau qhov saum npoo ntawm pob zeb diamond hlau txiav silicon wafer, siv cov haujlwm thiab kev ntxuav cov nyhuv zoo dua rau cov neeg ntxuav;
(5) Siv lub tshuab rov qab siv dej txias hauv online ntawm cov kab pob zeb diamond kom txo cov hmoov silicon hauv cov txheej txheem txiav, kom tswj tau cov hmoov silicon seem ntawm qhov chaw ntawm cov wafer silicon. Tib lub sijhawm, nws kuj tseem tuaj yeem ua rau kom muaj kev txhim kho ntawm qhov kub, dej ntws thiab lub sijhawm hauv kev ntxuav ua ntej, kom ntseeg tau tias cov hmoov silicon raug ntxuav raws sijhawm.
(6) Thaum lub silicon wafer raug muab tso rau ntawm lub rooj ntxuav, nws yuav tsum tau kho tam sim ntawd, thiab khaws cov silicon wafer ntub thaum lub sijhawm ntxuav tag nrho.
(7) Lub silicon wafer ua rau qhov chaw ntub thaum lub sijhawm degumming, thiab tsis tuaj yeem qhuav ntuj. (8) Hauv cov txheej txheem ntxuav ntawm silicon wafer, lub sijhawm raug rau hauv huab cua tuaj yeem txo qis kom deb li deb tau kom tiv thaiv kev tsim paj ntawm qhov chaw ntawm silicon wafer.
(9) Cov neeg ua haujlwm tu yuav tsum tsis txhob kov ncaj qha rau ntawm qhov chaw ntawm silicon wafer thaum lub sijhawm ntxuav tag nrho, thiab yuav tsum hnav hnab looj tes roj hmab, kom tsis txhob muaj kev luam ntawv ntiv tes.
(10) Hauv kev siv [2], qhov kawg ntawm lub roj teeb siv cov txheej txheem ntxuav hydrogen peroxide H2O2 + alkali NaOH raws li qhov sib piv ntawm 1:26 (3% NaOH kua), uas tuaj yeem txo qhov tshwm sim ntawm qhov teeb meem. Nws lub hauv paus ntsiab lus zoo ib yam li SC1 ntxuav kua (feem ntau hu ua kua 1) ntawm lub semiconductor silicon wafer. Nws lub tshuab tseem ceeb: zaj duab xis oxidation ntawm qhov chaw silicon wafer yog tsim los ntawm oxidation ntawm H2O2, uas yog corroded los ntawm NaOH, thiab oxidation thiab corrosion tshwm sim ntau zaus. Yog li ntawd, cov khoom me me uas txuas nrog hmoov silicon, resin, hlau, thiab lwm yam) kuj poob rau hauv cov kua ntxuav nrog txheej corrosion; vim yog oxidation ntawm H2O2, cov organic teeb meem ntawm qhov chaw wafer yog decomposed rau hauv CO2, H2O thiab tshem tawm. Cov txheej txheem ntxuav no tau ua rau cov tuam txhab silicon wafer siv cov txheej txheem no los ua cov txheej txheem ntxuav ntawm cov hlau pob zeb diamond txiav monocrystalline silicon wafer, silicon wafer hauv tsev thiab Taiwan thiab lwm lub tuam txhab roj teeb siv cov lus tsis txaus siab txog teeb meem dawb velvet. Tseem muaj cov chaw tsim roj teeb uas siv cov txheej txheem ntxuav ua ntej zoo sib xws, kuj tswj tau qhov zoo li ntawm cov xim dawb ntawm cov roj teeb. Nws tuaj yeem pom tias cov txheej txheem ntxuav no tau ntxiv rau hauv cov txheej txheem ntxuav silicon wafer kom tshem tawm cov seem silicon wafer kom daws tau qhov teeb meem ntawm cov plaub hau dawb ntawm qhov kawg ntawm lub roj teeb.
xaus lus
Tam sim no, kev txiav hlau pob zeb diamond tau dhau los ua cov thev naus laus zis tseem ceeb hauv kev txiav siv lead ua ib leeg, tab sis thaum txhawb nqa qhov teeb meem ntawm kev ua velvet dawb tau ua rau cov tuam txhab tsim silicon wafer thiab roj teeb muaj teeb meem, ua rau cov tuam txhab tsim roj teeb rau kev txiav hlau pob zeb diamond silicon wafer muaj qee qhov kev tiv thaiv. Los ntawm kev sib piv kev tshuaj xyuas ntawm thaj chaw dawb, nws feem ntau yog tshwm sim los ntawm cov seem ntawm qhov chaw ntawm silicon wafer. Txhawm rau kom tiv thaiv qhov teeb meem ntawm silicon wafer hauv lub cell zoo dua, daim ntawv no tshuaj xyuas qhov ua tau ntawm kev ua qias tuaj ntawm qhov chaw ntawm silicon wafer, nrog rau cov lus qhia txhim kho thiab kev ntsuas hauv kev tsim khoom. Raws li tus lej, thaj chaw thiab cov duab ntawm cov pob dawb, cov laj thawj tuaj yeem tshuaj xyuas thiab txhim kho. Nws raug pom zoo tshwj xeeb kom siv cov txheej txheem ntxuav hydrogen peroxide + alkali. Qhov kev paub zoo tau ua pov thawj tias nws tuaj yeem tiv thaiv qhov teeb meem ntawm kev txiav hlau pob zeb diamond silicon wafer ua velvet whitening, rau kev siv ntawm cov neeg sab hauv kev lag luam thiab cov chaw tsim khoom.
Lub sijhawm tshaj tawm: Tsib Hlis-30-2024